SPIE Advanced Lithography 2017 - 10143-89 Downloads Portal

Anamorphic Pupil Filter Calculator

This is an application for computing anamorphic pupil filters. While this application can standalone, some features require a PROLITH license, and the EasyPPI MATLAB toolbox. Requires MATLAB compiler runtime 2014b or later.
Download application
Download MATLAB runtime

EasyPPI

EasyPPI is a MATLAB toolbox for running PROLITH simulations through an object oriented API. The directory containing the EasyPPI source should be placed on your MATLAB path. Instructions are provided by the MathWorks here.
Download EasyPPI

Please contact Zac Levinson with any questions.